Uncertainty propagation in computationally expensive models: A survey of sampling methods and application to scatterometry

Heidenreich S, Gross H, Bär M, Wright L

smart sampling, statistical inverse problem, scatterometry

Document type Article
Journal title / Source Measurement
Peer-reviewed article 1
Volume in press, corrected proof
Issue in press, corrected proof
Page numbers / Article number -
Publisher's name Elsevier
Publisher's address (city only) Amsterdam
Publication date 2016-6-8
DOI 10.1016/j.measurement.2016.06.009
Web URL http://www.sciencedirect.com/science/article/pii/S0263224116302901
Language English

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