Traceable methods for vertical scale characterization of dynamic stroboscopic scanning white-light interferometer measurements

Heikkinen V, Kassmakov I, Seppä J, Paulin T, Nolvi A, Lassila A, Hæggström E
Keywords:

Stroboscopic scanning white-light interferometry (SSWLI),3D imaging of oscillating samples,Traceability of the vertical displacement measurement, metrology, uncertainties

Document type Article
Journal title / Source Applied Optics
Peer-reviewed article 1
Volume 54
Issue 35
Page numbers / Article number 10397-10403
Publisher's name OSA Publishing
Publisher's address (city only) Washington, D.C.
Publication date 2015-12-9
ISSN n/a
DOI 10.1364/AO.54.010397
Web URL https://www.osapublishing.org/ao/abstract.cfm?uri=ao-54-35-10397
Language English

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