Towards traceability in scatterometric-optical dimensional metrology for optical lithography
Bodermann Bernd, Endres Johannes, Groß Hermann, Henn Mark-Alexander, Kato Akiko, Scholze Frank, Wurm Matthias| Document type | Proceedings |
| Journal title / Source | DGaO-Proceedings |
| Publication date | 2015 |
| Conference name | 113th annual meeting of the DGaO |
| Conference date | 29 May - 1 June 2012 |
| Conference place | Eindhoven, The Netherlands |
| ISSN | 1614-8436 |
| Web URL | http://www.dgao-proceedings.de |
| Language | English |