Towards Quantitative Characterisation of the Small Force Transducer Used in Nanoindentation Instrument
Li ZL, Brand UBNanometrology, Nanoindentation Instrument, Nano-Force Transducer, Microelectromechanical Systems, Nano-Force Calibration
| Document type | Article |
| Journal title / Source | Modern Instrumentation |
| Peer-reviewed article | 1 |
| Volume | 2 |
| Issue | 4 |
| Page numbers / Article number | 61-67 |
| Publisher's name | Scientific Research |
| Publisher's address (city only) | Wuhan, China |
| Publication date | 2013-10 |
| ISSN | 2165-9257 |
| DOI | 10.4236/mi.2013.24009 |
| Web URL | http://file.scirp.org/pdf/MI_2013093011192540.pdf |
| Language | English |