Thickness and Microdomain Orientation of Asymmetric PS‑b‑PMMA Block Copolymer Films Inside Periodic Gratings

Lupi F., Aprile G., Giammaria T., Seguini G., Zuccheri G., De Leo N., Boarino L., Perego M.

PS-b-PMMA, self-assembly, trench, thin film, rapid thermal annealing, graphoepitaxy

Document type Article
Journal title / Source Applied Materials and Interfaces
Peer-reviewed article 1
Volume 7
Issue 42
Page numbers / Article number 23615-23622
Publisher's name ACS Publications
Publisher's address (city only) Washington
Publication date 2015-10-6
DOI 10.1021/acsami.5b07127
Language English

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