The statistical inverse problem of scatterometry: Bayesian inference and the effect of different priors

Heidenreich S, Gross H, Wurm M, Bodermann B, Bär M
Keywords:

Uncertainty quantification, Diffraction gratings, Hybrid metrology

Document type Proceedings
Journal title / Source Proc. SPIE 9526, Modeling Aspects in Optical Metrology V, 95260U (June 21, 2015)
Peer-reviewed article 1
Volume 9526
Issue Modeling Aspects in Optical Metrology V
Page numbers / Article number -
Publisher's name Society of Photo-Optical Instrumentation Engineers (SPIE)
Publisher's address (city only) Munich
Publication date 2015-6-21
Conference name SPIE Modeling Aspects in Optical Metrology V
Conference date 21-06-2015
Conference place Munich
ISSN -
DOI 10.1117/12.2185707
ISBN -
Web URL http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2344591
Language English

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