3D-Simulation of a Bayard Alpert ionisation gauge using SIMION program

Silva R., Bundaleski N., Fonseca A.L., Teodoro O.

Vacuum measurementIonisation gaugeSimulationGauge sensitivity

Document type Article
Journal title / Source Vacuum
Volume 164
Page numbers / Article number 300-307
Publisher's name Elsevier BV
Publication date 2019-6
ISSN 0042-207X
DOI 10.1016/j.vacuum.2019.03.039
Language English

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