Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet
Tagbo-Fotso Claudia, Buchholz Christian, Scholze Frank, Wu M., Naujok P., Thakare D., Philipsen V., Saadeh Q., Babalik Ayhan, Kupper Bettina, Soltwisch Victoroptical constants, thin films, EUV
| Document type | Article |
| Journal title / Source | Optical Materials Express |
| Volume | 13 |
| Issue | 1 |
| Page numbers / Article number | 78 |
| Publisher's name | Optica Publishing Group |
| Publisher's address (city only) | Washington, DC, United States |
| Publication date | 2022-12 |
| ISSN | 2159-3930 |
| DOI | 10.1364/OME.474887 |
| Language | English |