High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface

Ekberg P., Su R., Leach R.

Image processing, Pattern recognition, Imaging systems, Metrology, Calibration, Microscopy

Document type Article
Journal title / Source Optics Express
Volume 25
Issue 16
Page numbers / Article number 18703
Publisher's name The Optical Society of America
Publication date 2017-7-25
ISSN 1094-4087
DOI 10.1364/OE.25.018703
Web URL https://www.osapublishing.org/oe/abstract.cfm?uri=oe-25-16-18703
Language English

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