Sub-kHz traceable characterization of stroboscopic scanning white light interferometer
Heikkinen V, Kassamakov I, Paulin T, Nolvi A, Seppä J, Lassila A, Hæggström EScanning white light interferometry (SWLI), metrology, MEMs, NEMs,
Document type | Article |
Journal title / Source | SPIE proceedings |
Peer-reviewed article | 1 |
Volume | 9132 |
Issue | 1 |
Page numbers / Article number | 913218 |
Publisher's name | SPIE |
Publisher's address (city only) | Bellingham |
Publication date | 2014-5-1 |
DOI | 10.1117/12.2051622 |
Web URL | http://spie.org/Publications/Proceedings/Paper/10.1117/12.2051622 |
Language | English |