Investigation of error compensation in CGH-based form testing of aspheres

Stuerwald Stephan, Schmitt Robert

Computer holography, metrology, measurement, Nondestructive testing

Document type Proceedings
Journal title / Source
Volume 9132
Page numbers / Article number 91320H-91320H-10
Publication date 2014-5-1
Conference name Optical Micro- and Nanometrology V
Conference place San Francisco
DOI 10.1117/12.2052968

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