Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer
Seppä J, Kassamakov I, Nolvi, A, Heikkinen V, Paulin T, Hao L, Lassila A, Hæggsröm Estroboscopic scanning light interferometer, M(N)EMS devices, Interferometers ; Calibration ; Scanning ; Transducers ; Mirrors ; Equipment and services ; Heterodyning ; Lasers ; Light sources ; Metrology
| Document type | Proceedings |
| Journal title / Source | Proceedings of Society of Photo Optical Instrumentation Engineers |
| Peer-reviewed article | 1 |
| Volume | 8788 |
| Issue | n/a |
| Page numbers / Article number | 87883J |
| Publisher's name | SPIE |
| Publisher's address (city only) | n/a |
| Publication date | 2013-5-13 |
| Conference name | Optical Measurement Systems for Industrial Inspection VIII |
| Conference date | 13-05-2013 |
| Conference place | Munich, Germany |
| ISSN | n/a |
| DOI | 10.1117/12.2020525 |
| ISBN | n/a |
| Web URL | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1687502 |
| Language | English |