Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer

Seppä J, Kassamakov I, Nolvi, A, Heikkinen V, Paulin T, Hao L, Lassila A, Hæggsröm E
Keywords:

stroboscopic scanning light interferometer, M(N)EMS devices, Interferometers ; Calibration ; Scanning ; Transducers ; Mirrors ; Equipment and services ; Heterodyning ; Lasers ; Light sources ; Metrology

Document type Proceedings
Journal title / Source Proceedings of Society of Photo Optical Instrumentation Engineers
Peer-reviewed article 1
Volume 8788
Issue n/a
Page numbers / Article number 87883J
Publisher's name SPIE
Publisher's address (city only) n/a
Publication date 2013-5-13
Conference name Optical Measurement Systems for Industrial Inspection VIII
Conference date 13-05-2013
Conference place Munich, Germany
ISSN n/a
DOI 10.1117/12.2020525
ISBN n/a
Web URL http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1687502
Language English

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