Welcome to the EURAMET Repository Link

The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Very fast-opening UHV gate valve

Sonderegger, K., Duer, M., Buthig, J., Pantazis, S. and Jousten, K.
Keywords:

UHV, gate valve, dynamic pressure, gas expansion, load locks

Document typeArticle
Journal title / SourceJournal of Vacuum Science and Technology A
Volume31
Issue6
Publication date 2013
DOI10.1116/1.4813836
LanguageEnglish

Back to the list view