Very fast-opening UHV gate valve

Sonderegger K., Duer M., Buthig J., Pantazis S., Jousten K.

UHV, gate valve, dynamic pressure, gas expansion, load locks

Document type Article
Journal title / Source Journal of Vacuum Science and Technology A
Volume 31
Issue 6
Publication date 2013
DOI 10.1116/1.4813836

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