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Smart sensors and calibration standards for high precision metrology

Brand U., Gao S., Li Z., XU M., Buetefisch S., Peiner E., Frueauf J., Hiller K.
Keywords:

Calibration ; Metrology ; Smart sensors ; Silicon ; Sensors ; Microtechnology ; Dimensional metrology ; Equipment and services ; Fabrication

Document type Proceedings
Journal title / Source " Smart sensors and calibration standards for high precision metrology ", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170V (May 21, 2015); doi:10.1117/12.2179455; http://dx.doi.org/10.1117/12.2179455
Volume 9517
Issue 9517
Page numbers / Article number 95170V
Publisher's name SPIE
Publication date 2015-5-21
Conference name Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
Conference date May 4, 2015
Conference place Barelona, Spain
DOI 10.1117/12.2179455
Language English

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Information

Project title (JRP)
NEW05: MechProNO: Traceable measurement of mechanical properties of nano-objects
Name of Call / Funding Programme
EMRP A169: Call 2011 Metrology for New Technologies