Smart sensors and calibration standards for high precision metrology
Brand U., Gao S., Li Z., XU M., Buetefisch S., Peiner E., Frueauf J., Hiller K.Calibration ; Metrology ; Smart sensors ; Silicon ; Sensors ; Microtechnology ; Dimensional metrology ; Equipment and services ; Fabrication
Document type | Proceedings |
Journal title / Source | " Smart sensors and calibration standards for high precision metrology ", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170V (May 21, 2015); doi:10.1117/12.2179455; http://dx.doi.org/10.1117/12.2179455 |
Volume | 9517 |
Issue | 9517 |
Page numbers / Article number | 95170V |
Publisher's name | SPIE |
Publication date | 2015-5-21 |
Conference name | Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems |
Conference date | May 4, 2015 |
Conference place | Barelona, Spain |
DOI | 10.1117/12.2179455 |
Language | English |