Smart sensors and calibration standards for high precision metrology
Brand U., Gao S., Li Z., XU M., Buetefisch S., Peiner E., Frueauf J., Hiller K.Calibration ; Metrology ; Smart sensors ; Silicon ; Sensors ; Microtechnology ; Dimensional metrology ; Equipment and services ; Fabrication
| Document type | Proceedings |
| Journal title / Source | " Smart sensors and calibration standards for high precision metrology ", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170V (May 21, 2015); doi:10.1117/12.2179455; http://dx.doi.org/10.1117/12.2179455 |
| Volume | 9517 |
| Issue | 9517 |
| Page numbers / Article number | 95170V |
| Publisher's name | SPIE |
| Publication date | 2015-5-21 |
| Conference name | Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems |
| Conference date | May 4, 2015 |
| Conference place | Barelona, Spain |
| DOI | 10.1117/12.2179455 |
| Language | English |