Silicon double spring for the simultaneous calibration of probing forces and deflections in the micro range
Brand U., Li Z., Gao S., Hahn S., Hiller K.double spring, probing force calibration, bending force, bending deflection, stiffness
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Peer-reviewed article | 1 |
| Volume | 27 |
| Issue | 2016 |
| Page numbers / Article number | 015601 / 9 pp |
| Publisher's name | IOP Publishing Ltd. |
| Publisher's address (city only) | UK |
| Publication date | 2015-11-24 |
| DOI | 10.1088/0957-0233/27/1/015601 |
| Language | English |