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Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision

Silander I., Hausmaninger T., Forssén C., Zelan M., Axner O.
Keywords:

Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision

Document type Article
Journal title / Source Journal of Vacuum Science & Technology B
Volume 37
Issue 4
Page numbers / Article number 042901
Publisher's name American Vacuum Society
Publication date 2019-7
ISSN 2166-2746, 2166-2754
DOI 10.1116/1.5090860
Language English

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Information

Project title (JRP)
14IND06: pres2vac: Industrial standards in the intermediate pressure-to-vacuum range
Name of Call / Funding Programme
EMPIR 2014: Industry