Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision
Silander I., Hausmaninger T., Forssén C., Zelan M., Axner O.Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision
| Document type | Article |
| Journal title / Source | Journal of Vacuum Science & Technology B |
| Volume | 37 |
| Issue | 4 |
| Page numbers / Article number | 042901 |
| Publisher's name | American Vacuum Society |
| Publication date | 2019-7 |
| ISSN | 2166-2746, 2166-2754 |
| DOI | 10.1116/1.5090860 |
| Language | English |