Fine details of structural deviations in reference samples for scatterometry
Siefke T., Siaudinyté L., Jensen S.A., Rømer A. T. , Hansen P-E.Micro- and Nano fabrication, Deviation reference structures, Scatterometry, Industry, Innovation and Infrastructure
| Document type | Proceedings |
| Journal title / Source | 19th IMEKO TC10 Conference |
| Volume | 19 |
| Issue | TC10 |
| Page numbers / Article number | 1-5 |
| Publisher's name | IMEKO |
| Publisher's address (city only) | Budapest/HUNGARY |
| Publication date | 2023 |
| Conference name | 19th IMEKO TC10 Conference: “MACRO meets NANO in Measurement for Diagnostics, Optimization and Control” |
| Conference date | 21-09-2023 to 22-09-2023 |
| Conference place | Delft, The Netherlands |
| ISSN | ISBN: 978-92-990090-4-8 |
| DOI | 10.21014/tc10-2023.021 |
| ISBN | ISBN: 978-92-990090-4-8 |
| Web URL | https://www.imekotc10-2023.sztaki.hu/ |
| Language | English |
| Persistent Identifier | https://www.imeko.org/publications/tc10-2023/IMEKO-TC10-2023-021.pdf |