Hybrid metrology for nanometric energy harvesting devices
Siaudinyte L., Hansen P-E, Koops R, Xu J, Peiner Electron beam lithography, atomic force microscopy, Fourier scatterometry, hybrid metrology, diffraction, periodic nanostructures, nanowires
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 34 |
| Issue | 9 |
| Page numbers / Article number | 094008 |
| Publisher's name | IOP Publishing |
| Publisher's address (city only) | Bristol, United Kingdom |
| Publication date | 2023-6-22 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/acdf08 |
| Web URL | https://iopscience.iop.org/article/10.1088/1361-6501/acdf08/pdf |
| Language | English |