A review on hot cathode ionisation gauges with focus on a suitable design for measurement accuracy and stability
Jousten K., Boineau F., Bundaleski N., Illgen C., Šetina J., Teodoro O.M.N.D., Vicar M., Wüest M.Ionisation gauge, Hot cathode, Sensitivity, Secondary electrons, Electron stimulated desorption
Document type | Article |
Journal title / Source | Vacuum |
Volume | 179 |
Publisher's name | Elsevier |
Publisher's address (city only) | Munich |
Publication date | 2020-6-10 |
ISSN | 0042-207X |
DOI | 10.1016/j.vacuum.2020.109545 |
Language | English |