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A review on hot cathode ionisation gauges with focus on a suitable design for measurement accuracy and stability

Šetina, J., Teodoro, O.M.N.D., Illgen, C., Bundaleski, N., Boineau, F. (LNE), Jousten, K., Vicar, M. and Wüest, M.
Keywords:

Ionisation gauge, Hot cathode, Sensitivity, Secondary electrons, Electron stimulated desorption

Document typeArticle
Journal title / SourceVacuum
Volume179
Publisher's nameElsevier
Publisher's address (city only)Munich
Publication date 2020-06-10
ISSN0042-207X
DOI10.1016/j.vacuum.2020.109545
LanguageEnglish

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