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A review on hot cathode ionisation gauges with focus on a suitable design for measurement accuracy and stability

Jousten K., Boineau F., Bundaleski N., Illgen C., Šetina J., Teodoro O.M.N.D., Vicar M., Wüest M.
Keywords:

Ionisation gauge, Hot cathode, Sensitivity, Secondary electrons, Electron stimulated desorption

Document type Article
Journal title / Source Vacuum
Volume 179
Publisher's name Elsevier
Publisher's address (city only) Munich
Publication date 2020-6-10
ISSN 0042-207X
DOI 10.1016/j.vacuum.2020.109545
Language English

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Information

Project title (JRP)
16NRM05: Ion Gauge: Towards a documentary standard for an ionisation vacuum gauge
Name of Call / Funding Programme
EMPIR 2016: Pre-Co-Normative