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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Influence of block copolymer feature size on reactive ion etching pattern transfer into silicon

Dialameh, M., Ferrarese Lupi, F. (Laboratorio MDM, INM-CNR, Brianza, Italy), Imbraguglio, D., Zanenga, F., Lamperti, A., Martella, D., Seguini, G. (IMM-CNR), Perego, M. (Laboratorio MDM, IMM-CNR), Rossi, A.M., De Leo, N. and Boarino, L. (Istituto Nazionale di Ricerca Metrologica (INRiM))

block copolymers, reactive ion etching, self-assembly, cryogenic RIE, holey silicon

Document typeArticle
Journal title / SourceNanotechnology
Page numbers / Article number404001
Publisher's nameIOP Publishing
Publication date 2017-09-12
ISSN0957-4484, 1361-6528
Web URLhttp://iopscience.iop.org/article/10.1088/1361-6528/aa8144

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