Primary calibration of mechanical sensors with digital output for dynamic applications

Seeger B., Thomas B.

Primary calibration; MEMS; complex frequency response; digital interface; dynamic measurement

Document type Article
Journal title / Source Acta IMEKO
Volume 10
Issue 3
Page numbers / Article number 177 - 184
Publisher's name IMEKO
Publisher's address (city only) Braunschweig
Publication date 2021-9
ISSN 2221-870X
Language English
Persistent Identifier IMEKO-ACTA-10 (2021)-03-24

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