Primary calibration of mechanical sensors with digital output for dynamic applications
Seeger B., Thomas B.Primary calibration; MEMS; complex frequency response; digital interface; dynamic measurement
| Document type | Article |
| Journal title / Source | Acta IMEKO |
| Volume | 10 |
| Issue | 3 |
| Page numbers / Article number | 177 - 184 |
| Publisher's name | IMEKO |
| Publisher's address (city only) | Braunschweig |
| Publication date | 2021-9 |
| ISSN | 2221-870X |
| Web URL | https://acta.imeko.org/index.php/acta-imeko/article/view/IMEKO-ACTA-10%20%282021%29-03-24/0 |
| Language | English |
| Persistent Identifier | IMEKO-ACTA-10 (2021)-03-24 |