High accuracy flatness metrology within the European Metrology Research Program
Schulz M., Ehret G., Kren P.| Document type | Proceedings |
| Journal title / Source | Nuclear Instruments and Methods in Physics Research A |
| Volume | 710 |
| Page numbers / Article number | 37-41 |
| Publisher's name | Elsevier |
| Publisher's address (city only) | Amsterdam, Netherlands |
| Publication date | 2013 |
| Conference name | 4th International Workshop on Metrology for X-ray Optics, Mirror Design and Fabrication |
| Conference date | 4 - 6 July 2012 |
| Conference place | Barcelona, Spain |
| ISSN | 0168-9002 |
| DOI | 10.1016/j.nima.2012.10.112 |