High accuracy flatness metrology within the European Metrology Research Program

Schulz M., Ehret G., Kren P.
Document type Proceedings
Journal title / Source Nuclear Instruments and Methods in Physics Research A
Volume 710
Page numbers / Article number 37-41
Publisher's name Elsevier
Publisher's address (city only) Amsterdam, Netherlands
Publication date 2013
Conference name 4th International Workshop on Metrology for X-ray Optics, Mirror Design and Fabrication
Conference date 4 - 6 July 2012
Conference place Barcelona, Spain
ISSN 0168-9002
DOI 10.1016/j.nima.2012.10.112

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