Establishing traceability for on-wafer S-parameter measurements of membrane technology devices up to 110 GHz

Schmuckle Franz-Josef, Heinrich Wolfgang, Probst Thorsten, Arz Uwe, Zinal Sherko, Hechtfischer Gerd

on-wafer, calibration, S-parameters, traceability,uncertainty budget

Document type Proceedings
Journal title / Source 2017 90th ARFTG Microwave Measurement Symposium (ARFTG)
Publisher's name IEEE
Publication date 2017-11-30
Conference name ARFTG Microwave Measurement Symposium
Conference date 28-11-2017 to 01-12-2017
Conference place Boulder, Colorado
DOI 10.7795/EMPIR.14IND02.CA.20190403
ISBN 978-1-5386-4356-3
Language English

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