Scatterometric characterization of diffractive optical elements
Saastamoinen Toni, Husu Hannu, Laukkanen Janne, Siitonen Samuli, Turunen Jari, Lassila Anttiscatterometry, diffractive optical elements
| Document type | Proceedings |
| Journal title / Source | Proceedings of SPIE |
| Peer-reviewed article | 1 |
| Volume | 9173 |
| Issue | - |
| Page numbers / Article number | 91730I |
| Publisher's name | SPIE |
| Publisher's address (city only) | Bellingham |
| Publication date | 2015-9-10 |
| Conference name | SPIE Optics+Photonics 2014 |
| Conference date | 17-21 August, 2014 |
| Conference place | San Diego |
| ISSN | 0277-786X |
| DOI | 10.1117/12.2061699 |
| ISBN | 9781628412000 |
| Web URL | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1901269 |
| Language | English |