Multilevel effective material approximation for modeling ellipsometric measurements on complex porous thin films
Sachse R., Hodoroaba V-D., Kraehnert R., Hertwig A.Mueller Ellipsometry, thin film metrology, modelling
| Document type | Article |
| Journal title / Source | Advanced Optical Technologies |
| Volume | 11 |
| Issue | 3-4 |
| Page numbers / Article number | 137-147 |
| Publisher's name | Frontiers Media SA |
| Publisher's address (city only) | Lausanne, Switzerland |
| Publication date | 2022-6-22 |
| ISSN | 2192-8576, 2192-8584 |
| DOI | 10.1515/aot-2022-0007 |
| Language | English |