Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem
Roy S., Kumar N., Pereira S., Urbach H.Fourier scatterometry
| Document type | Article |
| Journal title / Source | Journal of Optics |
| Volume | 15 |
| Publication date | 2013 |
| DOI | 10.1088/2040-8978/15/7/075707 |