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Elemental depth profiling in transparent conducting oxide thin film by X-ray reflectivity and grazing incidence X-ray fluorescence combined analysis

Rotella, H., Caby, B., Ménesguen, Y., Mazel, Y., Valla, A., Ingerle, D., Detlefs, B. (CEA Laboratory of Electronics and Information Technologies (LETI), Minatec Campus, 17 rue des Martyrs, 38054 Grenoble, France), Lépy, M.-C., Novikova, A., Rodriguez, G., Streli, C. and Nolot, E. (CEA-LETI, 17 rue des Martyrs, 38054 Grenoble, France)
Keywords:

Combined >XRR-GIXRF, Depth profiling, thin films, TCO

Document typeArticle
Journal title / SourceSpectrochimica Acta Part B: Atomic Spectroscopy
Volume135
Page numbers / Article number22-28
Publisher's nameElsevier BV
Publication date 2017-09
ISSN0584-8547
DOI10.1016/j.sab.2017.06.011
LanguageEnglish

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