Elemental depth profiling in transparent conducting oxide thin film by X-ray reflectivity and grazing incidence X-ray fluorescence combined analysis

Rotella H., Caby B., Ménesguen Y., Mazel Y., Valla A., Ingerle D., Detlefs B., Lépy M.-C., Novikova A., Rodriguez G., Streli C., Nolot E.

Combined >XRR-GIXRF, Depth profiling, thin films, TCO

Document type Article
Journal title / Source Spectrochimica Acta Part B: Atomic Spectroscopy
Volume 135
Page numbers / Article number 22-28
Publisher's name Elsevier BV
Publication date 2017-9
ISSN 0584-8547
DOI 10.1016/j.sab.2017.06.011
Language English

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