Elemental depth profiling in transparent conducting oxide thin film by X-ray reflectivity and grazing incidence X-ray fluorescence combined analysis
Rotella H., Caby B., Ménesguen Y., Mazel Y., Valla A., Ingerle D., Detlefs B., Lépy M.-C., Novikova A., Rodriguez G., Streli C., Nolot E.Combined >XRR-GIXRF, Depth profiling, thin films, TCO
Document type | Article |
Journal title / Source | Spectrochimica Acta Part B: Atomic Spectroscopy |
Volume | 135 |
Page numbers / Article number | 22-28 |
Publisher's name | Elsevier BV |
Publication date | 2017-9 |
ISSN | 0584-8547 |
DOI | 10.1016/j.sab.2017.06.011 |
Language | English |