High-performance deterministic in situ electron-beam lithography enabled by cathodoluminescence spectroscopy
Rodt S., Reitzenstein S.in situ EBL, deterministic processing, cathodoluminescence spectroscopy, quantum dots, nanophotonics
| Document type | Article |
| Journal title / Source | Nano Express |
| Volume | 2 |
| Issue | 1 |
| Page numbers / Article number | 014007 |
| Publisher's name | IOP Publishing |
| Publication date | 2021-3 |
| ISSN | 2632-959X |
| DOI | 10.1088/2632-959X/abed3c |
| Web URL | https://iopscience.iop.org/article/10.1088/2632-959X/abed3c |
| Language | English |