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A numerical analysis of the short open load calibration robustness for capacitance measurements in Scanning Microwave Microscopy

Richert D., Deleruyelle D., Moran-Meza J., Kaja K., Imanaliev A., Hoffmann J., Gautier B., Piquemal F.
Keywords:

scanning microwave microscopy, finite element analysis, tip apex geometry, self-calibration, Maxwell equation

Document type Article
Journal title / Source Measurement Science and Technology
Volume 36
Page numbers / Article number 1-9
Publisher's name IOP Publishing
Publisher's address (city only) Bristol, United Kingdom
Publication date 2024-10-18
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/ad7e3b
Language English

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Name of Call / Funding Programme
EMPIR 2020: Industry