RF wafer probing with improved contact repeatability using nanometer positioning

Daffé K., Dambrine G., von Kleist-Retzow F., Haddadi K.

Probes, Standards, Frequency measurement, Radio frequency, Calibration, Microwave measurement,

Document type Proceedings
Journal title / Source Microwave Measurement Conference (ARFTG), 2016 87th ARFTG
Peer-reviewed article 1
Issue N/A
Page numbers / Article number N/A
Publisher's name IEEE
Publication date 2016-6-30
Conference name Microwave Measurement Conference (ARFTG), 2016 87th ARFTG
Conference date 27-05-2016 to 27-05-2016
Conference place San Francisco CA USA
DOI 10.1109/ARFTG.2016.7501967
ISBN 978-1-5090-1308-1
Web URL https://hal.archives-ouvertes.fr/hal-02083251/document
Language English

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