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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Applications of Tactile Microprobes for Surface Metrology

Reuter, C., Reum, A., Fahrbach, M., Peiner, E. (TU Braunschweig), Brand, U., Hofmann, M. and Rangelow, I.

piezoresistive cantilever, MEMS, atomic force microscopy, contact resonance, surfaceroughness

Document typeProceeding
Journal title / SourceSMSI 2020 - Sensors and Instrumentation
VolumeChapter A6
Page numbers / Article number87-88
Publisher's nameAMA Association for Sensors and Measurement
Publication date 2020-06
Conference nameSMSI 2020
Conference date22-06-2020 to 25-06-2020
Conference placeNuremberg, Germany
Persistent Identifierhttps://www.ama-science.org/proceedings/details/3655

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