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Applications of Tactile Microprobes for Surface Metrology

Reuter, C., Reum, A., Fahrbach, M., Peiner, E. (TU Braunschweig), Brand, U., Hofmann, M. and Rangelow, I.
Keywords:

piezoresistive cantilever, MEMS, atomic force microscopy, contact resonance, surfaceroughness

Document typeProceeding
Journal title / SourceSMSI 2020 - Sensors and Instrumentation
VolumeChapter A6
Issue2020
Page numbers / Article number87-88
Publisher's nameAMA Association for Sensors and Measurement
Publication date 2020-06
Conference nameSMSI 2020
Conference date22-06-2020 to 25-06-2020
Conference placeNuremberg, Germany
ISBN978-3-9819376-2-6
LanguageEnglish
Persistent Identifierhttps://www.ama-science.org/proceedings/details/3655

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