Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode
Refino A.D., Yulianto N., Syamsu I., Nugroho A.P., Hawari N.H., Syring A., Kartini E., Iskandar F., Voss T., Sumboja A., Peiner E., Wasisto H.S.high-aspect-ratio silicon (Si), nanowire array, lithium ion batteries, ICP-RIE
| Document type | Article |
| Journal title / Source | Scientific Reports |
| Volume | 11 |
| Issue | 1 |
| Publisher's name | Springer Science and Business Media LLC |
| Publication date | 2021-10 |
| ISSN | 2045-2322 |
| DOI | 10.1038/s41598-021-99173-4 |
| Web URL | https://www.nature.com/articles/s41598-021-99173-4 |
| Language | English |