Versatilely tuned vertical silicon nanowire arrays by cryogenic reactive ion etching as a lithium-ion battery anode

Refino A.D., Yulianto N., Syamsu I., Nugroho A.P., Hawari N.H., Syring A., Kartini E., Iskandar F., Voss T., Sumboja A., Peiner E., Wasisto H.S.

high-aspect-ratio silicon (Si), nanowire array, lithium ion batteries, ICP-RIE

Document type Article
Journal title / Source Scientific Reports
Volume 11
Issue 1
Publisher's name Springer Science and Business Media LLC
Publication date 2021-10
ISSN 2045-2322
DOI 10.1038/s41598-021-99173-4
Language English

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