Quasidynamic calibration of stroboscopic scanning white light interferometer with a transfer standard
Seppa J, Kassamakov I, Heikkenen V, Nolvi A, Paulin T, Lassila A, Haeggstrom EMicro(nano)electromechanical systems, Scanning white light interferometry, stroboscopic scanning white light interferometry, traceability
| Document type | Article |
| Journal title / Source | Optical Engineering |
| Peer-reviewed article | 1 |
| Volume | 51 |
| Issue | 12 |
| Page numbers / Article number | 124104 |
| Publisher's name | SPIE |
| Publisher's address (city only) | not known |
| Publication date | 2013-12-20 |
| ISSN | N/A |
| DOI | 10.1117/1.OE.52.12.124104 |
| Web URL | http://opticalengineering.spiedigitallibrary.org/article.aspx?articleid=1790550 |
| Language | English |