PTB's enhanced stitching approach for the high-accuracy interferometric form error characterization of spheres

Bartl Guido, Krystek Michael, Nicolaus Arnold
Keywords:

sub-aperture stitching, form error, silicon sphere, roundness, sphere interferometer

Document type Article
Journal title / Source Meas. Sci. Technol.
Peer-reviewed article 1
Volume 25
Issue -
Page numbers / Article number 064002 (8pp)
Publisher's name IOP
Publisher's address (city only) UK
Publication date 2014
ISSN -
DOI 10.1088/0957-0233/25/6/064002
Web URL -
Language English

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