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Application of active piezoresistive cantilevers in high-eigenmode surface imaging

Pruchnik B., Badura D., Kopczyński W., Czułek D., Rangelow I.W., Korpelainen V., Sierakowski A., Yacoot A., Gotszalk T.
Keywords:

Active cantilevers, Piezoresistive cantilevers, atomic force microscopy (AFM)

Document type Article
Journal title / Source Measurement Science and Technology
Volume 36
Issue 1
Page numbers / Article number 016020
Publisher's name IOP Publishing
Publisher's address (city only) Bristol, United Kingdom
Publication date 2024-11-11
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/ad8cf9
Language English

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