Application of active piezoresistive cantilevers in high-eigenmode surface imaging
Pruchnik B., Badura D., Kopczyński W., Czułek D., Rangelow I.W., Korpelainen V., Sierakowski A., Yacoot A., Gotszalk T.Active cantilevers, Piezoresistive cantilevers, atomic force microscopy (AFM)
| Document type | Article |
| Journal title / Source | Measurement Science and Technology |
| Volume | 36 |
| Issue | 1 |
| Page numbers / Article number | 016020 |
| Publisher's name | IOP Publishing |
| Publisher's address (city only) | Bristol, United Kingdom |
| Publication date | 2024-11-11 |
| ISSN | 0957-0233, 1361-6501 |
| DOI | 10.1088/1361-6501/ad8cf9 |
| Language | English |