Practical Fabry-Perot displacement interferometry in ambient air conditions with subnanometer accuracy
Voigt D., van de Nes A.S., van den Berg S.A.Fabry-Perot interferometers, interferometry, nanotechnology, calibration, sensors, engineering, refractive index
| Document type | Proceedings |
| Journal title / Source | Proceedings of SPIE |
| Volume | 9203 |
| Page numbers / Article number | 920308 |
| Publisher's name | SPIE |
| Publisher's address (city only) | Bellingham |
| Publication date | 2014-8-18 |
| Conference name | SPIE Optics & Photonics Congress, Interferometry XVII: Techniques and Analysis |
| Conference date | 17-08-2014 to 21-08-2014 |
| Conference place | San Diego, CA, USA |
| ISSN | 1996-756X |
| DOI | 10.1117/12.2060537 |
| Language | English |