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Development and characterisation of a low pressure transfer standard in the range 1 Pa to 10 kPa

Boineau F., Huret S., Otal P., Plimmer M.
Keywords:

pressure, vacuum, transfer standard, resonant silicon gauge, mcapacitance diaphragm gauge

Document type Article
Journal title / Source ACTA IMEKO
Volume 7
Issue 1
Page numbers / Article number 80
Publisher's name IMEKO International Measurement Confederation
Publication date 2018-4
ISSN 2221-870X
DOI 10.21014/acta_imeko.v7i1.496
Language English

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Information

Project title (JRP)
14IND06: pres2vac: Industrial standards in the intermediate pressure-to-vacuum range
Name of Call / Funding Programme
EMPIR 2014: Industry