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A high-accuracy working standard for absolute pressure from 5 kPa to 130 kPa

Boineau F., Huret S., Otal P., Plimmer M.

absolute pressure, calibration, working standard, capacitance diaphragm gauge, resonantsilicon gauge

Document type Article
Journal title / Source International Journal of Metrology and Quality Engineering
Volume 8
Page numbers / Article number 26
Publisher's name EDP Sciences
Publication date 2017
ISSN 2107-6847
DOI 10.1051/ijmqe/2017020
Language English

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Project title (JRP)
14IND06: pres2vac: Industrial standards in the intermediate pressure-to-vacuum range
Name of Call / Funding Programme
EMPIR 2014: Industry