D-Band Characterization of a Commercial High-Resistivity Silicon Calibration Substrate
Phung G.N., Koo H., Chi C., Kwon J-Y, Arz U.calibration, coplanar waveguides, on-wafer, probes, standards
| Document type | Proceedings |
| Journal title / Source | 2023 101st ARFTG Microwave Measurement Conference (ARFTG) proceedings |
| Publication date | 2023-10-17 |
| Conference name | 2023 101st ARFTG Microwave Measurement Conference |
| Conference date | 16-06-2023 to 16-06-2023 |
| Conference place | San Diego, CA, USA |
| DOI | 10.5281/zenodo.13902956 |
| Language | English |