On the Influence of Metal Chucks in Wideband On-Wafer Measurements
Phung G.N., Arz U.calibration, coplanar waveguides, on-wafer, probes
| Document type | Proceedings |
| Journal title / Source | 2022 98th ARFTG Microwave Measurement Conference |
| Publisher's name | IEEE |
| Publication date | 2022-8 |
| Conference name | 2022 98th ARFTG Microwave Measurement Conference |
| Conference date | 17-01-2022 to 18-01-2022 |
| Conference place | Las Vegas |
| ISBN | 978-1-6654-0662-8 |
| Web URL | https://oar.ptb.de/resources/show/10.7795/EMPIR.18SIB09.CA.20220915C https://oar.ptb.de/files/download/632b08fd704400007c006391 |
| Language | English |
| Persistent Identifier | 978-1-6654-0662-8 |