The Importance of Material Measurement in on-Wafer Metrology
Phung G.material measurements, uncertainties
| Document type | Proceedings |
| Journal title / Source | 2026 26th International Microwave and Radar Conference (MIKON) |
| Page numbers / Article number | 67-68 |
| Publisher's name | IEEE |
| Publisher's address (city only) | Piscataway, NJ, United States |
| Publication date | 2026-1-1 |
| Conference name | 26th International Microwave and Radar Conference |
| Conference date | 18-21 May 2026 |
| Conference place | Kraków, Poland |
| ISSN | 2995-0570 |
| DOI | 10.23919/MIKON66970.2026.11578009 |