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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

Brand, U., XU, M. (PTB), Doering, L., Langfahl-Klabes, J., Behle, H., Bütefisch, S., Ahbe, T. (PTB, Braunschweig, Germany), Mickan, B. (PTB), Peiner, E. (TU Braunschweig), Völlmeke, S., Frank, T., Kiselev, I., Drexel, M. and Hauptmannl, M.

cantilever microprobe, high-speed, contact resonance, tip wear, piezo-resistive, mechanical damping, tip-testing standard, cantilevers, micromechanical devices, surface topography measurement, shape measurement

Document typeDatasets
Journal title / SourceOpen Access Repository PTB
Publisher's namePhysikalisch-Technische Bundesanstalt (PTB)
Web URLhttps://oar.ptb.de/resources/show/10.7795/720.20200515

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