Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology
Pahl T., Hooshmand H., Birk A., Karamehmedović M., Fu L., Lehmann P., Piano S., Reichelt S., Leach R., Hansen P.ELight scattering Rigorous model Electric field Maxwell's equation
| Document type | Article |
| Journal title / Source | Journal of Computational Physics |
| Volume | 521 |
| Issue | 15 January |
| Page numbers / Article number | 113519 |
| Publisher's name | Elsevier BV |
| Publisher's address (city only) | Amsterdam, NX, Netherlands |
| Publication date | 2025-1-15 |
| ISSN | 0021-9991 |
| DOI | 10.1016/j.jcp.2024.113519 |
| Language | English |