Surface Patterning by Local Plasma Jet Sacrificial Oxidation of Silicon
Paetzelt H., Arnold T., Böhm G., Pietag F., Schindler A.plasma jet, silicon oxides; surface modification; thin films
| Document type | Article |
| Journal title / Source | Plasma Processes and Polymers |
| Volume | 10 |
| Issue | 5 |
| Publication date | 2014 |
| ISSN | 1612-8869 |
| DOI | 10.1002/ppap.201200099 |
| Web URL | http://onlinelibrary.wiley.com/journal/10.1002/(ISSN)1612-8869 |