Application of the differential Fabry–Perot interferometer in angle metrology

Özgür B., Akgöz A., Hamid R., Yandayan T., Şahin E., Çelik M., Çetintaş M., Yandyan T.
Keywords:

Angle metrology, Differential Fabry–Perot interferometry, small angle generators, autocollimators, Synchrotron and X-FEL optics

Document type Article
Journal title / Source Measurement Science and Technology
Volume 27
Issue 3
Page numbers / Article number 035201
Publisher's name IOP Publishing
Publication date 2016-1-20
ISSN 0957-0233, 1361-6501
DOI 10.1088/0957-0233/27/3/035201
Language English

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