Application of the differential Fabry–Perot interferometer in angle metrology

Özgür B., Akgöz A., Hamid R., Yandayan T., Şahin E., Çelik M., Çetintaş M., Yandyan T.

Angle metrology, Differential Fabry–Perot interferometry, small angle generators, autocollimators, Synchrotron and X-FEL optics

Document type Article
Journal title / Source Measurement Science and Technology
Volume 27
Issue 3
Page numbers / Article number 035201
Publisher's name IOP Publishing
Publication date 2016-1-20
ISSN 0957-0233, 1361-6501
DOI 10.1088/0957-0233/27/3/035201
Language English

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