Application of the differential Fabry–Perot interferometer in angle metrology
Özgür B., Akgöz A., Hamid R., Yandayan T., Şahin E., Çelik M., Çetintaş M., Yandyan T.Angle metrology, Differential Fabry–Perot interferometry, small angle generators, autocollimators, Synchrotron and X-FEL optics
Document type | Article |
Journal title / Source | Measurement Science and Technology |
Volume | 27 |
Issue | 3 |
Page numbers / Article number | 035201 |
Publisher's name | IOP Publishing |
Publication date | 2016-1-20 |
ISSN | 0957-0233, 1361-6501 |
DOI | 10.1088/0957-0233/27/3/035201 |
Language | English |