Optical thin film metrology for optoelectronics
Petrik PPDocument type | Article |
Journal title / Source | Journal of Physics : Conference series |
Peer-reviewed article | 1 |
Volume | 398 |
Issue | 1 |
Page numbers / Article number | 012002 |
Publisher's name | IOP Publishing |
Publisher's address (city only) | London |
Publication date | 2012 |
ISSN | 1742-6588 |
DOI | 10.1088/1742-6596/398/1/012002 |
Web URL | http://iopscience.iop.org/article/10.1088/1742-6596/398/1/012002/pdf |
Language | English |